设备概要

  大型液晶面板制造工程用阻光剂集中供给系统

  使用 200L 大型容器供给 , 大幅降低成本

  全面使用单独脱泡技术 , 取代残余物资

保证精度

  0.5um 以上的 Particle ≦ 20 pcs/ml

Features

• Photo resist purchase cost and reduction of container replacement frequency are possible with large-sized Container

• Central supply from 200L polyethylene drum is possible

• Supply of photo resist is possible without including bubble