设备概要

  两种或三种混酸的调和系统

  粉末或高浓度原液的稀释调和系统

  高精度线上浓度测定装置

保证精度

纳入实绩

  Al 蚀刻液            H 3 PO 4 + HNO 3 + CH 3 COOH

  Si 蚀刻液            HNO 3 + HF + HNO 3 + HF + CH 3 COOH

  ITO 蚀刻液           (COOH) 2       從粉末

  显影液 ( 彩色滤光片 )   Na 2 CO 3    從粉末

  剥离液 ( 彩色滤光片 )   KOH

Features

• Mixed acid proportion system of two kinds or three kinds is possible

• Dilution proportion system from powder is possible

• System has highly precise in-line densitometry unit

• Example

Al – Etchant H 3 PO 4 + HNO 3 + CH 3 COOH

Si – Etchant HNO 3 + HF + HNO 3 + HF + CH 3 COOH

ITO- Etchant (COOH) 2     from Powder

Developer(Color Filter) Na 2 CO 3    from Powder

Stripper(Color Filter)  KOH