设备概要

  渐近法显影液稀释系统

  按照 25wt% TMAH 渐近法稀释使用 Process 滴定装置来确认 2,380 wt% TMAH 制造浓度

保证精度

   2.380 ± 0.002wt%

纳入实绩

  17 社 25 套系统

Features

• Delivery experience for 300mm 65nm process

• High reliability by Potentiometric titration method

• Reduction of mixing-time by jet agitation

• Dilution performance within ± 0.002% of conc. (Actual results ± 0.001wt%)